Description
Developed for powerful measurement capabilities with trusted quality and technology
ICOE IMS measuring microscope combines the high-magnification observation ability of metallographic microscope and the X, Y, Z-axis surface dimension measurement function of image measuring instrument, and has various observation functions such as bright field, dark field, differential interference, and polarized light. It can be widely used in the detection of semiconductor, PCB, LCD, mobile phone industry chain, optical communication, basic electronics, mold hardware, medical equipment, automobile industry, measurement industry and other fields.
Ergonomic tilting adjustable observation tube
The angle of the observation tube can be adjusted arbitrarily within the range of 3-35 degrees. Whether standing or sitting, it can meet the user’s operating requirements to the greatest extent, and at the same time, there is no worry about the height difference of the user.
Large travel stage
Stages with a variety of travel options are available
IMS210A stage travel 200 (X) mm x 100 (Y) mm,
IMS320A platform stroke 300(X) mmx200 (Y) mm,
IMS330A platform stroke 300(X) mmx300 (Y) mm,
IMS430A platform stroke 400(X) mmx300 (Y) mm,
Whether it is a large sample or a small sample, it can meet the user’s measurement and sawing requirements. If users have other requirements, they can also customize the platform according to their needs.
Epi-illuminator
The epi-illuminator is a component that completes the preprocessing of the incident light in the microscope imaging optical path and the reprocessing of the emitted light. Its structure including
1. Bright and Dark Field Selecting Pole
2. Analyzer Group
3. Assist Focusing module lock screw
4. Polarizer Group
5. Dimming film Group
6. Light source（5W LED White）
Polarizer Group
1. 360°Rotate Analyzer Flashboard
2. Polarizer Flashboard
All-in-one design with highly integrated functions
The integrated work table not only reserves the position of the desktop host, but also has a retractable keyboard drawer, and the overall appearance is clean and comfortable. Various operable parts are within easy reach, and the operation is easy and convenient. It is ergonomic and the user can easily perform the operation by standing without a pedicle.
● IC advanced package bumping size measurement
● IC advanced packaging bumping alignment accuracy measurement
● PCB board solder foot measurement
● Measurement of LCD panel TFT
Precision measuring tools
ICOE IMS measuring microscope adopts a 3-axis measuring system with a reading of 0.1um. The Z-axis recording stroke can reach 170mm. The Z-axis is controlled by a high-precision electric controller integrated on the frame. Three different speeds are available for selection, focusing is highly maneuverable, improving efficiency and reducing fatigue
Independent split-image light source to assist focus
The independent split image light source controller can adjust the brightness of the light source according to the different backgrounds of the sample, and display the best focal plane clearly and accurately. There are two split image patterns to choose from and switch at will.
Self-developed measurement software
The ICOE IMS measuring microscope is equipped with easy-to-use, powerful measuring software, which allows customers to set test preferences according to the saw. The software comes with all kinds of manual and automatic point-taking functions, which have a wider range of applications, and can perform high-precision measurement even for complex shapes.
System Diagram
Product Models and Specifications
| Model | IMS-210A | IMS-320A | IMS-330A | IMS-430A | |
| Optical system | Infinity optical system | ● | ● | ● | ● |
| Viewing head | 5°~35° tilt angle adjustable, erect image, infinity trinocular observation tube, unilateral diopter adjustment, ±5 diopter, interpupillary distance adjustment range, 50mm~76mm, two-step beam splitting ratio, binocular:trinocular= 100: 0, 0: 100 | ● | ● | ● | ● |
| Eyepiece | High eye point wide field plan eyepiece PL10X/22mm | ●● | ●● | ●● | ●● |
| High eye point wide field plan eyepiece PL10X/22mm, with micrometer | ○ | ○ | ○ | ○ | |
| High eye point wide field plan eyepiece PL10X/22mm, adjustable diopter | ○ | ○ | ○ | ○ | |
| High eye point wide field plan eyepiece PL10X/22mm, adjustable diopter, with micrometer | ○ | ○ | ○ | ○ | |
| Nosepiece | Sextuple motorized nosepiece (with DIC slot) | ● | ● | ● | ● |
| BD Sextuple motorized nosepiece (with DIC slot) | ○ | ○ | ○ | ○ | |
| Objective | Infinite long working distance plan achromatic metallurgical DIC objective 5X/0.15, WD: 10.8mm | ● | ● | ● | ● |
| Infinite long working distance plan achromatic metallurgical DIC objective 10X/0.3, WD: 12.2mm | ● | ● | ● | ● | |
| Infinite super long working distance plan achromatic metallurgical DIC objective 20X/0.4, WD: 8.8mm | ● | ● | ● | ● | |
| Infinite long working distance plan achromatic metallurgical objective 50X/0.55, WD: 7.9mm | ● | ● | ● | ● | |
| Infinite long working distance plan achromatic metallurgical objective 100X/0.8, WD: 2.1mm | ○ | ○ | ○ | ○ | |
| Infinite long working distance BD plan achromatic metallurgical DIC objective 5X/0.15, WD: 9mm | ○ | ○ | ○ | ○ | |
| Infinite long working distance BD plan achromatic metallurgical DIC objective10X/0.3, WD: 9mm | ○ | ○ | ○ | ○ | |
| Infinite super long working distance BD plan achromatic metallurgical DIC objective20X/0.45, WD: 3.4mm | ○ | ○ | ○ | ○ | |
| Infinite long working distance BD semi-apochromatic metallurgical objective 50X/0.55, WD: 7.5mm | ○ | ○ | ○ | ○ | |
| Infinite long working distance BD semi-apochromatic metallurgical objective 100X/0.8, WD: 2.1mm | ○ | ○ | ○ | ○ | |
| Stand & Base | Marble base, with Z-axis electric focusing, electric controller, Z-axis travel 150mm, Z-axis repeatability ±2um, with 5W LED transmitted illumination, adjustable brightness, dimensions: 500mmx770mmx960mm, weight 155kg | ● | ● | ||
| Marble base, with Z-axis electric focusing, electric controller, Z-axis travel 150mm, Z-axis repeatability ±2um, with 5W LED transmitted illumination, adjustable brightness, dimensions: 670mmx940mm x960mm, weight 200kg | ● | ● | |||
| Digital display | Digital display meter, 3-axis display accuracy is 0.1um, optional unit mm/inch, each axis has a reset button, the minimum display accuracy is 0.1um, and the display unit supports mm/inch switching. | ● | ● | ● | ● |
| Electric controller | Electric controller, with automatic/manual Z-axis focusing, independent control of up/down auxiliary focusing three light sources, support for adjustable brightness, including X/Y/Z individual reset and one-key reset, motorized control converter, configuration Z axis movement emergency stop button | ● | ● | ● | ● |
| Stage | Manual measurement platform, stroke 200(X)mmx100(Y)mm, X/Y measurement accuracy: (2+L/100) um, platform includes quick-moving device and fine-tuning device, maximum load capacity: 10KG, table size 258mmx358mm , Weight 25KG | ● | |||
| Manual measurement platform, stroke 300(X)mmx200(Y)mm, X/Y measurement accuracy: (3+L/100) um, platform includes quick-moving device and fine-tuning device, maximum load capacity: 15KG, table size 350mmx500mm , Weight 45KG | ● | ||||
| Manual measurement platform, stroke 300(X)mmx300(Y)mm, X/Y measurement accuracy: (3+L/100) um, platform includes fast moving device and fine-tuning device, maximum load capacity: 20KG, table size 500mmx500mm , Weight 60KG | ● | ||||
| Manual measurement platform, stroke 400(X)mmx300(Y)mm, X/Y measurement accuracy: (3+L/100) um, platform includes quick-moving device and fine-tuning device, maximum load capacity: 20KG, table size 458mmx620mm , Weight 70KG | ● | ||||
| Illumination | Bright & dark field illumination, with BD switch device; with filter slots for filters and plarizing kit, coaxial light: 5W LED (warm), transsion light: 5W LED (cold), the brightness is adjustable and integrated into the front panel | ● | ● | ● | ● |
| Auxiliary focus module, with light/dark wedge switch, with green 5W LED light source (with 100V-240V wide voltage, 5W LED controller, dimmable) | ● | ● | ● | ● | |
| DIC | DIC Differential Interference Component | ○ | ○ | ○ | ○ |
| Interference filter, blue (for reflection): ≤480nm | ○ | ○ | ○ | ○ | |
| Interference filter, blue (for reflection): 520nm-570nm | ○ | ○ | ○ | ○ | |
| Interference filter, blue (for reflection): 630nm-750nm | ○ | ○ | ○ | ○ | |
| Imported reflective polarizer group: including polarizer group, 360-degree rotating analyzer board | ○ | ○ | ○ | ○ | |
| Camera | Image camera imported from Germany: target size: 1/1.8 inch ; resolution: 1600×1200(1.9MP), frame rate: 20fps, 3 million pixels | ● | ● | ● | ● |
| C mount | 0.5X CTV, C mount, foucsing adjustable | ○ | ○ | ○ | ○ |
| 0.65X CTV, C mount, foucsing adjustable | ● | ● | ● | ● | |
| PC | Lenovo Computer Yangtian M4000q (I5-10400 8G IT), with 21.5-inch display | ● | ● | ● | ● |
| Software | IMS precision measurement software, real-time display of digital display 3-axis data, configuration of image measurement module, support for automatic edge finding, automatic magnification recognition and other functions, customized terminal data upload function | ● | ● | ● | ● |
| Others | High precision micrometer, grid value 0.01mm | ○ | ○ | ○ | ○ |
| Ordinary micrometer, grid value 0.01mm | ○ | ○ | ○ | ○ | |
| Calibration sheet | ● | ● | ● | ● | |
| Table | Table for the device, 1075mm x 995mm x 685mm, weight: 120kg | ○ | ○ | ○ | ○ |
Product Dimensions (mm)
